| 摘要 |
PURPOSE:To enhance the inspection performance in the inspection of a bridge, by sweeping a beam spot at a plurality of preset sweep positions and judging the presence of the bridge when reflected beam is detected at all of the sweep positions to perform the detection of the bridge. CONSTITUTION:Finely converged beam B is scanned to irradiate a printed circuit board P to be inspected and the sputter beam of the beam spot of the beam B is detected by a beam receiver 13 to perform the inspection of the printed circuit board P. Then, the beam B is successively scanned at a plurality of sweep positions X1-X3 preset between the mounting part holes H performing the detection of a bridge on the solder surface of the printed circuit board P to sweep the beam spot and, when a sweep position where the reflected beam of the beam spot is not detected is present at least at one place, the absence of the bridge is judged and, when the reflected beam of the beam spot is detected at all of the sweep positions X1-X3, the presence of the bridge is judged to perform the detection for the bridge. |
