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发明名称
SEMICONDUCTOR PROCESSING
摘要
申请公布号
GB2168841(B)
申请公布日期
1988.07.20
申请号
GB19840032572
申请日期
1984.12.22
申请人
* STC PLC
发明人
PETER DENNIS * SCOVELL;PAUL JOHN * ROSSER
分类号
H01L21/28;H01L21/285;H01L21/321;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
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地址
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