| 摘要 |
PURPOSE:To measure the shape of a body optically by providing a lens eccentrically with the optical axis of a light source, and detecting the position of reflected light from a body to be measured at two positions and calculating displacement from the detection outputs. CONSTITUTION:A parallel light beam emitted by the light source 1 is made incident eccentrically on an objective 2, the reflected light from the body 3 to be measured is received by the lens 2 again and split by beam splitters 4 and 5 respectively, and the respective reflected light beams are photodetected by optical position detecting elements 6 and 7. The detected light beams of the elements 6 and 7 are sent to an arithmetic processing part 8, which calculates the displacement. Thus, the shape or displacement of the body to be measured is measured without being affected by its inclination. Further, the inclination of the body to be measured can be measured.
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