| 摘要 |
PURPOSE:To form uniform glow discharge, by forming one of coupled electrodes for supplying electric energy to reactive gas into a plurality of acicular structures, and providing a grid between the electrodes to enable to remove local strong discharge. CONSTITUTION:The apparatus is constituted with a reaction vessel 2 evacuated below 1 atm., a supply system for supplying reactive gas to said vessel 2, an exhaustion system and a film-forming domain between the supply and exhaustion systems. A substrate 1 having a surface on which a film will be formed is provided in said film-forming domain. Out of the first and second electrodes 3, 8 for supplying electric energy to reactive gas, the electrode 3 provided at the side of supplying said reactive gas is formed into a plurality of acicular electrodes. In addition, a grid 12 having electric conductivity and isolated from the electrodes 3, 8 is provided between the electrodes 3 and 8. |
