| 摘要 |
PURPOSE:To make accuracy maintenance attainable even after heating and degasification and to optimize the utilization in a vacuum, in the title table, by using a solenoid for the holding and preload of a raceway track of the slide table constituted of two sets of ball guide bearings. CONSTITUTION:Solenoids 22, 33 and 43 are used for the holding and preload of a raceway track 10 of the slide table constituted of two sets of ball guide bearings. And, at the time of heating and degasification, the raceway track 10 held by these solenoids 22, 33 ands 43 and subjected to preload is opened from a base plate 15 and a movable carriage 25, preventing its deformation due to thermal stress from occurring, and after being cooled, it is held again and preloaded whereby bearing accuracy is maintainable. Thus, these solenoids 22, 33 and 43, optionally capable of releasing its energization, are used, whereby heat deformation of the raceway track 10 is hard to occur at the time of heating the slide table, and the holding and preload of the track 10 is made possible by remote control. Therefore, it can be made optimum for utilization in a vac uum. |
