发明名称 GAS PHASE ION SOURCE
摘要 PURPOSE:To prevent dielectric breakdown due to application of high acceleration voltage by cooling a gas in a cooling device and introducing the cooled gas into an ionization chamber and simultaneously restricting the amount of the gas. CONSTITUTION:A He gas introduced from an introducing part 28 is cooled by liquid He in a heat exchanger 25, and it passes through an insulating tube 20 and via an orifice 23 and flows in an ionization chamber 3. The He gas is cooled by liquid He in a Dewar container 2. Hence, the gas is densified so as to obtain high insulating withstand voltage.
申请公布号 JPS63175318(A) 申请公布日期 1988.07.19
申请号 JP19870007934 申请日期 1987.01.16
申请人 JEOL LTD 发明人 AIHARA RYUZO
分类号 H01J27/08;H01J27/26;H01J37/08 主分类号 H01J27/08
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