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发明名称
Method of sputtered depositing chromium-silicon-nitrogen resistor
摘要
申请公布号
US4758321(A)
申请公布日期
1988.07.19
申请号
US19850740686
申请日期
1985.06.03
申请人
U.S. PHILIPS CORP.
发明人
VUGTS, LUDOVICUS
分类号
H01C7/00;H01C7/06;H01C17/12;(IPC1-7):C23C14/34
主分类号
H01C7/00
代理机构
代理人
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地址
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