| 摘要 |
PURPOSE:To prevent the lowering of laser output by a method wherein fans are each provided in the respective vicinities of reflectors and so on constituting a resonator and a probability that a solid impurity is adhered on the surfaces of the reflectors is decreased. CONSTITUTION:Two fans 10, which are each provided in the respective vicinities of two reflectors 8 constituting a resonator and are rotated in connection with a blower 4, are provided on both insides of a laser tube 1 in such a way as to each correspond to the two reflectors 8. The blower 4 is always rotated at the time of generation of laser pulse and laser gas 2 is made to circulate, but at the same time, by always rotating the fans 10 coupled with the blower 4, a solid impurity 9 is stopped its movement to the directions of the reflectors 8 and the impurity 9 is never adhered on the reflectors 8. Thereby, the lowering of laser output is prevented. |
