| 摘要 |
<p>PURPOSE:To obtain a sensor providing a stable characteristic in a high- temperature/high-humidity environment, by hydrolyzing silicon alkoxide to obtain a sol with carbon particles dispersed, which is gelatinized into a film to be sintered on a substrate produced by gelatinizing and drying a silica sol. CONSTITUTION:A fine powder silica is dispersed in a sol produced by hydrolyzing silicon alkoxide [Si(OR)4, wherein R: alkyl group) and after the pH value thereof is controlled to 3-6 with the addition of base, the work is gelatinized and dried to make a substrate 34. A sol with carbon particles dispersed in the silicon alkoxide is arranged to form a film 31 on the substrate and the film is gelatinized, dried and sintered to obtain a moisture sensor 3. The moisture sensor 3 thus obtained is used as feedback resistance to build a sense amplifier 2. A signal with a fixed amplitude and frequency is applied to an input of the sense amplifier from an oscillation circuit 1; after being rectified 4, the amplifier output is inputted into a logarithmic amplification circuit 5 to obtain a moisture signal.</p> |
