| 摘要 |
PURPOSE:To eliminate the reactive power and prevent the response delay of a discharge by forming a protecting conductive inorganic thin film made of a specific thin film on a barium film having a high secondary electron emission ratio and formed on linear metal electrodes. CONSTITUTION:End sections of linear metal electrodes 15 made of Ni, Al, Ag, Cu or Au and arranged on a back glass substrate 19 are extended to the outside of a discharge container 14. A protecting conductive inorganic thin film 16b made of a thin film of 5000Angstrom or below is formed on a barium thin film 16a formed to cover the metal electrodes 15 at the thickness of 20mum or below. For example, Ta, Au, W, OS, or T1 having an atomic radius larger than that of Ba is used for this thin film 16b. Glass substrates 19-21 and the periphery of the junction of an exhaust pipe 22 are hermetically melted with glass frit or the like.
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