| 摘要 |
PURPOSE:To make a wiring pattern passing the step part of a piezoelectric film unnecessary, by providing an electrode to be connected to the outside on the lower part of the piezoelectric film, and providing a third electrode confronting with both electrodes interposing the piezoelectric film. CONSTITUTION:Exciting electrodes 3 and 5 to be connected to the wiring patterns 7 and 8 are provided in advance, and the piezoelectric film 4 is formed on them. The third electrode 9 unnecessary to be connected electrically to the outside is provided at a part confronting with the exciting electrodes 3 and 5 on the piezoelectric film 4. The third electrode 9 is to impress an electric field from the exciting electrodes 3 and 5 at the lower part in a direction of film pressure effectively.
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