| 摘要 |
PURPOSE:To form high accuracy track width, narrow track width and shallow gap depth by forming a tapered recessed part and exposing a gap material, in an area where no conductive body of an insulated film exists, etching the gap material to desired gap length, and forming the second magnetic material on the whole surface. CONSTITUTION:A rectangular recessed part is formed on an insulated film 6 and a gap material 4 is exposed, and in this state, by using the insulated film 6 as a mask, the gap material 4 is brought to etching. As a result, on the gap material 4 on a first magnetic material, a tapered recessed part is formed, becomes correct gap length in the bottom face of the recessed part which becomes the surface horizontal to the surface of the substrate 1, and the bottom part is formed to a rectangle in which one side becomes a track width dimension (a), and the other side becomes roughly a gap depth dimension (b). The rectangular dimension of the bottom face is formed in a state that there is no influence of a step difference, therefore, can be formed with high accuracy. By forming the upper magnetic material 7 thereon, the first magnetic material and the second magnetic material are opposed by placing the correct gap length between, and a thin film magnetic head having the high accuracy narrow track width dimension, and the high accuracy small gap depth can be obtained. |
