| 摘要 |
PURPOSE:To measure the gas permeability of a film to be inspectedm in the presence of steam of <=100 deg.C by measuring the concentration of which contains steam in the 1st the 2nd chamber of a permeable film cell heated at specific temperature. CONSTITUTION:The permeable film cell 1 which is partitioned into a high- concentration chamber 3 and low-concentration chamber 3 by the film 2 to be inspected is heated by a heater provided along the external surface at the specific temperature higher than, 100 deg.C. Then gaseous helium is supplied from a gaseous helium cylinder 5 into said chambers 3 and 4. Then mixed gas of steam, oxygen, and nitrogen is supplied into the high-concentration chamber 3 inside is substituted with the gaseous helium and after a stable is entered, the concentration of the mixed, gas in this chamber 3 is analyzed quantitatively by a gas chromatograph 40. Then the concentration of mixed gas which permeates the film 2 to be inspected and enters the low-concentration chamber 3 is analyzed quantitatively by the chromatograph 40. the gas permeability of the film 2 to be inspected is measured from the analytic results.
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