| 摘要 |
PURPOSE:To inspect the matching state of a land pattern of a position corresponding to the size of a parts, etc., by processing an image obtained by image picking up at an image pickup part, and deciding the normal/defective condition of the land pattern formed on a board. CONSTITUTION:An X-Y table 20, an illumination part 21, and a processing part 22 are provided on an inspecting device, and a bit of land information is extracted from the image obtained by image picking up a non-mounted board 25 based on the position and shape data inputted by using a board 24 for teaching. The normal/defective condition of the land pattern is decided based on the bit of land information and the position information and the shape data of the parts, and an inspection data file is generated, and based on the file, a board 26 to be inspected is inspected based on the file. The table part 20 drives pulse motors 31 (31a, 31b) and 32 being operated based on a control signal from a processing part 23. And the normal/defective condition of the land pattern generated on the board 26 is decided by a deciding part CPU46 in the processing part 23, and the state of matching of the pattern corresponding to the size of the parts is inspected. |
