| 摘要 |
PURPOSE:To inspect a ceramic substrate without being affected by a striped pattern, etc., on the surface of a substrate by sending an ultrasonic wave into the substrate, detecting a reflected wave from a crack or cavity, etc., and decided whether or not the substrate is normal. CONSTITUTION:An ultrasonic wave generating and analytic inspecting device 6 sends and receives the ultrasonic wave to and from the ceramic substrate of a test head 5b through an ultrasonic wave transmitting and a receiving probe. The obtained received signal is analyzed to judges whether or not there is the crack, cavity, etc., in the middle of an ultrasonic wave propagation path from the analytic result and outputs a normal/abnormal decision signal to a controller 10. Namely, the similarly between a template waveform obtained by a normal sample substrate and test waveform gathered by using the ceramic substrate to be inspected is calculated to inspect whether or not there is a difference between both waveforms. |
