| 摘要 |
<p>PURPOSE:To prevent the peeling of a resist due to an alkaline solution and a strong acid, and to prevent the generation of the pin hole of a shading film due to washing by coating the shading film composed of an inorg. material and a siliside film of a high melting point metal having the thinner thickness than that of the shading film on a transparent substrate in this order. CONSTITUTION:The shading film 2 composed of the inorg. material and the siliside film 3 of the high melting point metal having the thinner thickness than that of the shading film 2 are coated on the transparent substrate 1 in this order. Namely, the siliside film 3 of the high melting point metal is coated on the surface of a Cr-film 1 to improve the corrosion resisting property of the Cr-film, without losing the workability of said Cr-film. The siliside film 3 of the high melting point metal has the excellent corrosion resistant property, and does not occur the chemical reaction with the resist 4. The siliside film is exemplified by molybdenum siliside (MoSi), tungsten siliside (WSi) and titanium siliside (TiSi), etc. Thus, the generation of the pin hole by etching the Cr-film with the alkaline solution is prevented.</p> |
