| 摘要 |
PURPOSE:To form the film of the title copying photosensitive body at a high rate by forming the cost constituting the photosensitive body by the combination of hybrid resonance and a glow discharge CVD method. CONSTITUTION:A substrate 10 in a reaction space is rotated in its circumferential direction and heated by a halogen lamp heater 7, and a DC high-frequency electric field is impressed on meshy electrodes 20 and 20'. Meanwhile, gaseous Ar as a nonproductive gas is supplied to a resonance space 2 through a system 18, a magnetic field is impressed by air-core coils 5 and 5', and a microwave is supplied to the resonance space 2 from a microwave oscillator 3. The pressure of the reaction space and the resonance space 2 is controlled to 1X10<-2>-300Torr, and changed while maintaining the electric discharge. A productive gas 22 is discharged into the reaction space through a system 16, excited by the gaseous Ar excited in the resonance space 2, and activated, and an electric field is impressed by the couple of electrodes 20 and 20'. By this method, the thick coat of the copying photosensitive body is formed on the substrate 10 at a high rate. |
