| 摘要 |
A method of manufacture of multilayer devices comprises successively directing charged particles at a body of a first material (5) thereby causing the separation of particles of material from said body, depositing said particles in atomic or molecular layers on a substrate (8) and then directing charged particles at a body of a second material, thereby causing separation of particles of said second material from said body of the second material and then depositing said particles of said second material in atomic or molecular layers on the layers of said first material on said substrate. |
