| 摘要 |
PURPOSE:To detect the three-dimensional coordinates of a body point and the normal line direction of a surface element with high accuracy without contacting by providing 2nd and 3rd optical system which have symmetrical parallel optical axes in the same plane across the optical axis of a 1st optical system and three light sources. CONSTITUTION:Light sources 10b and 10c are provided deviating from a light source 10a at a reference position horizontally and vertically by DELTAx and DELTAy. Further, the optical systems 2 and 3 are provided which have the same focal length and the parallel optical axes O2 and O3 symmetrically in the same plane across the optical axis O1 of the optical system 1, and the rear focal plane of the optical system 1 is made coincident with the front focal planes of the optical systems 2 and 3. Further, diaphragms 4 and 5 are arranged and the optical systems 2 and 3 are made telecentric. Then laser light beams from the light sources 10a-10c are reflected by a mirror 9 and a prism 8 to illuminate object points P1-P3 on a body 11, and their reflected light beams form image points P1'-P3' on image sensors 6 and 7 through optical axes O2 and O3. An image processing method finds the three-dimensional coordinates of the object points P1-P3 from the coordinates of the image points P1'-P3' to find the normal of surface elements containing the object points P1-P3.
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