| 摘要 |
PURPOSE:To stably and accurately inspect an object irrelevantly to position shifts of the outer appearance and peripheral part of the object by reducing the outer appearance of the object by expanding a background image and forming an inspection area invariably inside the stable peripheral part. CONSTITUTION:An image of the object is picked up by a TV camera 1, whose image pickup signal is converted into a binary signal, which is stored in an original picture memory 3. At the same time, a connection analysis part 4 checks on the connection of each run to give connective runs the same number, and stores run numbers in scanning order. An outward appearance extraction part 5 reads the original picture out of the memory 3 in the scanning order and compares it with the run numbers to extract run number indicating the background. An image reduction part 6 enlarges the background image to reduce and store the object image in a reduced image memory 7. Consequently, an internal area 15 after the peripheral part and the variation part of the outer appearance are removed are removed can be extracted from the image in the memory 7. A feature extraction part 8 performs logical operation for reading and superposing the images in the memories 7 and 3 and extracts data on the internal pattern 13. This data is read out by a CPU 9 to inspect whether or not there is a defect. |
