| 摘要 |
PURPOSE:To enable evaluation of insulating property in the submicron order, by making a positively charged particle irradiate a sample contacting an electrode to which a negative voltage is applied to detect the amount of particles generated. CONSTITUTION:Positive ions released from an ion gun 1 are converged with a lens section 2 to irradiate a measuring part of an insulating sample 3. By irradiation with the positive ions, the ion irradiated part of the sample 3 is charged positively. As a result of the charging, secondary ions toward a detector 7 change in trajectory to reduce the detection of secondary ions. With such an arrangement, an electrode 4 with a negative voltage applied thereto is arranged near the ion irradiated part positively charged and hence, the relaxation of charging occurs between the ion irradiated part and the electrode 4. This eases the decrease in the intensity of negative secondary ions, thereby enabling measurement of hourly changes in the detected intensity of the secondary ions. Thus, the insulating property of the sample 3 can be evaluated by detecting a decrease level of the intensity of the secondary ions per unit time with an arithmetic unit 8. |
