| 摘要 |
PURPOSE:To enable the development process to be performed rapidly and evenly in the least consumption of developer by a method wherein the development is processed making use of a circular member with a developer feed port and a ring member controlling the developer flow. CONSTITUTION:A substrate 3 vacuum-sucked at a mounting base 4 is shifted to a circular member 5a lifted upward. Next, when a developer flows in parallel with a substrate 3 led by a feed port 5b of the member 5a, the developer is directed in the downstream direction by a part 5c opposite to another ring member 5d to be fed evenly at high speed so that the developer may come into contact with the substrate 3 to make the development process rapid and even in the least consumption of the developer. Resultantly, even larger substrate to be processed can form excellent pattern in even line width and high economic efficiency by even development. |
