发明名称 THERMAL HEAD AND MANUFACTURE THEREOF
摘要 PURPOSE:To obtain a thermal head not generating uniformity in recorded density due to scattering of the film thickness of a glaze layer, by using light having a component slanted to a substrate as light for exposure of a photoresist, and causing the area of each recording dot to vary according to the thickness of the glaze layer. CONSTITUTION:A photo-mask 6 provided with a predetermined mask pattern for selective exposure of a photoresist 5 is laid on the back side of the photoresist 5. In this condition, light having a component slanted to the substrate 1 is made to be incident on the substrate 1. Because of the uniformity of the film thickness of a glaze layer 2, a gap is generated between the photoresist 5 and the photo-mask 6. For example, when the film thickness of the glaze layer 2 is 50 mum at a thicker part and 45 mum at a thinner part, a gap of 5 mum is generated. Thus, when the width of a pattern in the mask 6 is 100 mum, the photoresist 5 may be exposed to light with a pattern with of 106 gm, and light having an angle of divergence of about 30 deg. with respect to parallel light may be projected.
申请公布号 JPS63168370(A) 申请公布日期 1988.07.12
申请号 JP19860313292 申请日期 1986.12.29
申请人 YOKOGAWA ELECTRIC CORP 发明人 KOMIYAMA MAKOTO;MATSUKURA SUSUMU;ODAWA HIROSHI;KATSUOKA SHUJI
分类号 B41J2/345;B41J2/335 主分类号 B41J2/345
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