| 摘要 |
PURPOSE:To enable highly airtight holding on the measuring side with a simple construction, by welding a metal part of a pressure sensor on a metal part of a housing of a pressure sensor device. CONSTITUTION:A cap 5 of a pressure sensor 1 houses a pressure sensor element in which a piezo-electric diffusion resistance is formed on the surface of a silicon diaphragm. A metal part such as the cap 5 and a base plate 4 in the sensor 1is welded on a cylindrical rib 11 as metal part of a housing 2. This enables a highly airtight holding with a simple construction requiring no O ring on the measuring side with a pressure induction port 4.
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