| 摘要 |
PURPOSE:To effectively remove a waste gas and to prevent the inconvenience due to heating by removing the heat and waste gas caused at soldering time with a cooling gas removal means. CONSTITUTION:The substrate 2 loading a part on in advance is placed in the specified position on a supporting base 1 and a beam projection part 3 is moved to the specified position on the substrate 2 by being moved with a driving part 4. At this time, a gas blowing out duct 6 and suction duct 7 are moved together with the beam projection part 3. The gas is thereafter blown out of the gas blowing duct 6 and the suction of the gas body is started by the suction duct 7. A high energy beam is then projected toward the lead of the part on the sub strate 2 from the beam projection part 3. The heat and waste gas caused at the soldering time by the beam projection part 3 is removed by blowing a specific gas from the gaseous body blowing duct 6 of a cooling gas removal part 5 to such the gas and waste gas by the gas suction duct 7. Consequently the efficiency of the high energy beam is improved to prevent the irregular reflection of the beam.
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