发明名称 |
Multiple gas injection apparatus for LPCVD equipment |
摘要 |
A quick-release multiple gas injection pipe connector fitting for removable attachment to a gas reaction chamber having a plurality of gas injection passages. The fitting permits a number of gas inlet lines to be removed from or attached to a reaction chamber fixture in one operation without a separate removal or attachment step for each gas line. The fitting also facilitates a process where the reaction gases are preferably mixed only at the reaction site and not before.
|
申请公布号 |
US4756272(A) |
申请公布日期 |
1988.07.12 |
申请号 |
US19860869638 |
申请日期 |
1986.06.02 |
申请人 |
MOTOROLA, INC. |
发明人 |
KESSLER, PETER H.;CALVERT, SR., WILSON D.;PINTCHOVSKI, FAIVEL S. |
分类号 |
C23C16/44;C23C16/455;C30B25/14;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|