| 摘要 |
<p>A bed of silicon powder is heated in an oven having an N2 contg. atmosphere. The temp. in the bed is measured and compared with that at another point in the oven. The oven conditions are regulated according to the temp. difference so as to ensure that the temp. in the bed does not exceed a specified valve, above which beta-silicon nitride is formed. Specifically the oven conditions are regulated by removing the heat source from the oven, rarifyng the nitrogen in the atm. in the oven by reducing the pressure in the oven.</p> |
