| 摘要 |
PURPOSE:To obtain a dense diamond film having an uniform thickness, by introducing a given gas onto a substrate having homogeneously dispersed fine particles having SP<3> bonds and depositing diamond. CONSTITUTION:Fine particles having SP<3> bonds are homogeneously dispersed on the surface of a substrate. A gas for forming diamond containing at least hydrogen atoms, carbon atoms and oxygen atoms is introduced onto the sub strate. The above-mentioned substrate is then heated at 500-1,300 deg.C to disperse the afore-mentioned gas for forming the diamond. Thereby the aimed dense diamond film having a uniform thickness is formed on the substrate.
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