| 摘要 |
PURPOSE:To attain a pattern recognition in a short time by positioning a wafer to be measured based on plural pictures at the time of moving a table respectively in an X direction and a Y direction. CONSTITUTION:The wafer 1 is set on the table 2 and the directions x, y of the street lines thereof substantially coincide the moving direction of the table 2 and are set. Then, the table 2 is moved at a constant speed in the Y direction to obtain the picture data of the small block of the wafer 1 at that time. Further, every time when the small block is moved by a prescribed quantity in the x direction, the picture data is obtained, and they are defined to be the set Dx of the picture data. Similarly, the table 2 is moved to the X direction to obtain the set Dy of the picture data. The above-mentioned operations are executed on the registered wafer and the wafer to be measured, the sets of both the picture data are respectively compared, thereby, the misregistration in the wafer to be measured is detected to position it. |
