| 摘要 |
PURPOSE:To decrease defects and the abrasion of the title capillary due to attachment of metal and the like and thermal shocks and to make is possible to achieve a long life of a capillary, by using a sintered body, which includes Si, Al and Y as main components at specified ratios, has a high a density and a low void ratio. CONSTITUTION:At least a tip part S comprises a fine ceramics, which has a logic density ratio of 99% and includes main components of 90-97wt.% Si (converted into a nitride), 0.5-8wt.% Al and 0.5-8wt.% Y (converted into an oxide). The void-area occupying ratio at the surface and the cross section of a capillary is 0.5% or less. The maximum void diameter is 5mum or less. Such a capillary is used. For example, mixed powder, in which silicon nitride powder, Y compounds such as Y2O2 and Yn and Al compounds such as Al2O3, AlN and AlON are mixed so that the above described composition of the sintered body is obtained, is molded into a desired body. The mixture is burned by a hot press method, a non-compressed burning method and a compressed gas burning method. Implementation of fine texture is accelerated by a hot hydrostatic pressure press method, and the capillary 1 is manufactured. |
