OXIME SULPHONATES CONTAINING REACTIVE GROUPS

摘要

Oxime sulfonates of formula I (I) wherein Y is a polymerizable unsaturated group or epoxide group or an -OH, -NHR5, -COOH, COOR6, -COCl, -CH2Hal, -SO2Cl or -NCO group, Z is an (x+y)-valent connecting member, R1 and R2 are monovalent organic radicals, m is 0 or 1, x is 1 or 2 and y is 1 or 2, can be converted into polymers which can be thermally or photochemically dissociated to form free sulfonic acid groups. Said polymers can therefore be used as photoresists which can be developed with aqueous alkalis.