| 摘要 |
PURPOSE:To prevent microstrip lines close to a buyer hole from being dropped at their impedance by forming slits on an earth conductor correspondingly to the microstrip lines. CONSTITUTION:A monolithic microwave integrated circuit (MMIC) consisting of an FET 2, microstrip lines 3, 8, a buyer hole 11, etc., is formed on one face of a semiconductor substrate 1. An earth conductor 13 formed on the other face of the substrate 1 is brought into contact with the buyer hole 11 formed on one face and slits 12 are formed on the positions corresponding to the lines 3, 8. Thereby, an electric field is concentrated into the end faces of the slits 12 and the impedance of the lines 3, 8 is increased. Consequently, the lines 3, 8 close to the buyer hole 11 can be prevented from being dropped at their impedance, the freedom of their arrangement is increased and the MMIC with high performance can be easily manufactured. |
