| 摘要 |
PURPOSE:To obtain a small-sized moisture sensitive element having high reliability and productivity by forming said element into three-layered structure in which the moisture sensitive film of a moisture sensitive function part is sandwiched by an upper electrode and lower electrode. CONSTITUTION:Porous metallic films are first patterned at two points on a substrate 3 consisting of glass, SiO2, etc., to form lead taking out parts 1, 2, respectively. The lower electrode 4 consisting of a thin noble metal film is then formed so as to contact the lead taking out part 2 on the substrate 3. The lower electrode 4 is patterned by a mask vapor deposition, etc., so as not to contact the lead taking out part 1 in contact with the upper electrode 6. The moisture sensitive film 5 is thereafter formed on the substrate 3 on which the lead taking out parts 1 and 2 and the lower electrode 4 are formed, by using a high-polymer material such as acrylic monomer and coating a soln. mixture composed of a moisture sensitive material over the entire surface of the substrate inclusive of the lower electrode 4, then thermally curing the coating. The extremely thin noble metal film having moisture permeability is then formed as the lower electrode 6 from above said film so as to confront the electrode 6 and to contact the lead taking out part 1.
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