| 摘要 |
PURPOSE:To prevent the shaft in the caption from oscillation or irregular rotation by setting the depth of grooves for generating fluid pressure formed on the outer peripheral surface of a rotary shaft in a range between -2mum and +2mum. CONSTITUTION:On the rotary shaft made of ceramic is fixed a mask on which is transferred a groove in the same as that of a groove for generating fluid pressure to be formed. Sandblasting is performed by using a natural abrasive like a natural siliceous sand or an artificial abrasive like a silicon carbide so that herringbone type grooves are formed. Accordingly, it is possible to obtain the high precision grooves for generating fluid pressure whose depth accuracy is ranged between -2mum and +2mum, that is, depth dispersion is small, and bottom surfaces are flat. The rotary shaft can therefore, be obtained with an excellent rotational accuracy and abrasion-resistance.
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