摘要 |
PURPOSE:To obtain a hard amorphous carbon film having high hardness, superior adhesion, wear resistance and lubricity, by incorporating Si and P into an amorphous carbon film contg. H. CONSTITUTION:Si and P are incorporated into an amorphous carbon film contg. H to obtain a hard amorphous carbon film contg., by atom, >=10% H, 100ppm-0.1% Si and 100-1,000ppm P, having very high hardness and suitable for the surface protection of a magnetic disk. The hard amorphous carbon film is formed with a tripolar DC glow discharge-plasma vapor synthesis device. Electrodes 2, 6 are placed opposite to each other in the vacuum vessel 1 of the device, a screen mesh electrode 3 is placed between the electrodes 2, 6 and a prescribed DC voltage is impressed. A gaseous mixture consisting of gaseous CH4/H2 10, gaseous SiH4/H2 11 and gaseous PH3/H2 12 in a prescribed ratio is introduced into the vessel 1 from the inlet 4 and regulated to a prescribed pressure by a rotary pump 9. Glow discharge is caused and the hard amorphous carbon film is formed on a substrate 5 set on the electrode 6.
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