| 摘要 |
PURPOSE:To easily obtain an inexpensive block for accuracy inspection which has the same accuracy with the use of a standard by using principally a 1st reference plane and a 2nd reference plane adjacent to it among six planes of a cubic block main body. CONSTITUTION:The block main body 11 has a reference plane 12, a reference plane 13 perpendicular to it, a supporting surface 14 (or 15) which supports the plane 12 in parallel to an XY (or XZ)-axial plane, and a supporting plate 16 which supports the plane in parallel to the XY-axial plane. Then, a measurement 21 is set on the plane 12, a measurement point 22 is set on a straight line which runs on the point 21 and is parallel to the plane 13 at a distance from the point 21, and a measurement point 23 is set on a straight line which runs on the point 21 and perpendicular to said straight line at a distance from the point 21. Then the measurement points are arranged at the respective vertexes of a right-angled triangle having its right-angle point at the point 21, the points 21 and 22 are arranged in parallel to one of the two axes to be measured to measure an error in the pitch between the measurement points, and this is rotated by 90 deg. to measure the pitch between the measurement points again; and the size measurement error of each axis and the squareness between both axes are calculated from the difference between those pitch values.
|
