| 摘要 |
PURPOSE:To rapidly and easily measure the thickness distribution of a translucent film, by relatively moving a member to be measured, a light source part and a linear sensor in the direction traversing the irradiation line to the member to be measured by a feed apparatus. CONSTITUTION:A light source part 17 irradiating the member M to be measured on a table 10 with light in a line form and the linear sensor 18, which is opposed to the light source part 17 through the member M and receives the light transmitted through the translucent film F and substrate B of the member M from the light source part 17 to output the signal corresponding to the intensity of received light, are provided in opposed relation to the member M to be measured and the output of said sensor 18 is taken in an operational control part 21 to calculate the thickness of the film F. In measurement, the member M is placed on the table 10 and the feeding of a feed apparatus 15 is controlled by the control signal sent out from the control part 21 to move the table 10 at a definite pitch and, at each stop position of this pitch feed, the thickness distribution of the film F is measured by line like irradiation light.
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