| 摘要 |
PURPOSE:To perform the degassing treatment in the body of a detection part while preventing the overheating of a semiconductive pressure-sensitive sensor part, by a method wherein a sensor receiving part is fixed to the body of the detection part by welding and, while said sensor receiving part is partially cooled, the remaining part thereof is heated to high temp. under vacuum. CONSTITUTION:On the basis of vacuum pressure as the reference pressure acting on a barrier diaphragm 2, the pressure of the process fluid on a side to be measured acting on a diaphragm 3 is taken out as the electrical signal corresponding to the deformation quantity of a pressure-sensitive sensor 8a and said electric signal is amplified to be displayed on a meter or to be subjected to remote transmission. On the basis of this absolute pressure transmitting signal, a sensor receiving part 8 having the semiconductive pressure-sensitive sensor 8a provided therein is welded and fixed to the body 1 of a detection part having pressure measuring diaphragm 2, 3 provided thereto and the body 1 or the welded connection part of the sensor receiving part 8 to said body 1 is baked under the vacuum of a vacuum oven 10 while the overheating of the pressure-sensitive sensor 8a is prevented by cooling said receiving part 8 by cooling water to perform the degassing treatment in the body 1 of the detection part.
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