| 摘要 |
PURPOSE:To perform the desired refrigerating capacity distribution to cryo- pumps by detecting the phase of the opening/closing cycle of He gas suction/ discharge valves and controlling the operation timing of each cryo-pump refrigerator. CONSTITUTION:Phase detecting sensors 9, 9' of suction/discharge valves are fitted to two cryo-pumps 3, 3' respectively. Phase signals from the phase detecting sensors 9, 9' are fed to a phase difference detecting/comparing device 7, and the phase difference between the suction/discharge valves of both cryo- pumps is determined. If this phase difference differs from the preset phase difference, the operation timing of each of the refrigerator drive power supplies 15, 15' of the respective cryo-pumps is adjusted by a suction/discharge valve timing control device 8 so that the preset phase difference is attained.
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