| 摘要 |
PURPOSE:To obtain a hard amorphous carbon film having high hardness, superior adhesion, wear resistance and lubricity, by incorporating Si and W into an amorphous carbon film contg. H. CONSTITUTION:Si and W are incorporated into an amorphous carbon film contg. H to obtain a hard amorphous carbon film contg., by atom, 10-35% H, 100ppm-0.1% Si and 50-500ppm W, having very high hardness and suitable for the surface protection of a magnetic disk. The hard amorphous carbon film is formed in a vacuum vessel 1 evacuated to a prescribed pressure by a rotary pump 9. Electrodes 2, 6 are placed opposite to each other in the vessel 1, a screen mesh electrode 3 made of W is placed between the electrodes 2, 6 and a prescribed DC voltage is impressed. A gaseous mixture consisting of gaseous CH4 10, gaseous H2 11 and gaseous SiH4/H2 12 in a prescribed ratio is introduced into the vessel 1 from the inlet 4, glow discharge is caused and the hard amorphous carbon film is formed on the surface of a substrate 5 set on the electrode 6. |
