| 摘要 |
PURPOSE:To obtain the title apparatus capable of measuring the thickness of a film with sufficiently high accuracy even in continuous measurement, by providing a resetting means for generating a reset pulse in an image sensor to perform resetting. CONSTITUTION:Since the wavelength incident to each element of an image sensor 11 is predetermined by a spectral means 9, the relation between the number of each element of the sensor 11 and the wavelength is preliminarily stored in the memory of an operation means 13. At the time of measurement, the output of each element of the sensor 11 is successively read and the memory is utilized to calculate wavelengths lambda1, lambda2 from the element number imparting an extreme value within a measuring range and degree difference N is calculated from the difference in the number of extreme values and predetermined operation is performed using the refractive index in the memory to calculate the thickness of an object 4 to be measured. In this case, each pixel output of the sensor 11 is transmitted at every predetermined time T and charge is accumulated in each pixel during that time but, when resetting is performed only for a time t1 by a resetting means 6, charge is not accumulated in each pixel during this period and the charge only corresponding to the time t2 after the release of resetting is accumulated. As mentioned above, when measurement is performed while an accumulation time is limited, the thickness of a film can be stably and continuously measured with high accuracy.
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