| 摘要 |
PURPOSE:To perform highly accurate measurement by making it possible to increase the contrast between a light part and a dark part even when there is optical anisotropy, by arranging a polarizer so that a polarizing axis is set on the incident light path of white light in an arbitrary straight line polarizing direction. CONSTITUTION:The white light emitted from a white light source 1 is condensed to the pinhole on a pinhole 3 by a condenser 2 and further converted to parallel light by a collimator lens 4 to become only linear polarized light having the vibration direction of a P- or S-wave component by a polarizing plate 5 and said linear polarized light is incident to the incident point of an object 6 to be measured through the incident window of a condenser 7. The reflected light from the object 6 is guided to a fractionating lens 11 and only the same direction component of the emitted light of each optical fiber 10 among the reflected lights condensed to the condenser 7 is guided to an extracting pinhole plate 12 and a light having a light part and a dark part is amplified by an image intensifier 15 through a collimator lens 13, a plane diffraction lattice 14 and an image forming lens 15 and the intensity of light at every wavelength is detected on a linear image sensor 18. Then, the wavelengths of the light and dark parts are calculated to operate the film thickness of the object 6.
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