APPARATUS FOR PRODUCING SINGLE CRYSTAL

摘要

: The invention provides an apparatus for producing a single crystal according to the CZ method. The apparatus comprises a closed container consisting of upper and lower halves and having a shaft for pulling up the single crystal. At least that part of the container which contacts the vapor of the elements is made of a material containing an element of the same group of the Periodic Table as that of the component elements of the single crystal. A gap between the shaft and the container and an opening between the upper and lower halves of the container are sealed with a sealing material. At least one reservoir is positioned in the container for supplying the vapor of a volatile component element of the single crystal. Heating means are provided around the container. A hot zone of the apparatus including the container is made of a material which has an X-ray absorption coefficient not larger than 5 cm2/g, and said material of the hot zone has a thickness such that the X-ray transmittance through the whole hot zone is 10-6 or more so that the single crystal being pulled up may be monitored by X-ray fluoroscopy.