发明名称 |
INTEGRATED AMBIENT SENSING DEVICES AND METHODS OF MANUFACTURE |
摘要 |
<p>INTEGRATED AMBIENT SENSING DEVICES AND METHODS OF MANUFACTURER Methods are disclosed for forming multi-element ambient sensing devices on a single monolithic substrate such as a silicon planar device using photolithographic techniques to pattern a multiplicity of chemically sensitive layers while taking into account the range of materials to the patterned and the problems of their cross-contamination when in contact.</p> |
申请公布号 |
CA1238950(A) |
申请公布日期 |
1988.07.05 |
申请号 |
CA19850472439 |
申请日期 |
1985.01.18 |
申请人 |
INTEGRATED IONICS, INC. |
发明人 |
LAUKS, IMANTS R.;VAN DER SPIEGEL, JAN |
分类号 |
G01N27/333;G01N27/414;(IPC1-7):G01N27/26 |
主分类号 |
G01N27/333 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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