| 摘要 |
PURPOSE:To heat an article to be treated more uniformly, and to diffusion-treat the article to be treated efficiently by arranging a nonmetallic heater in an end zone. CONSTITUTION:When nonmetallic heaters 6, 7 are disposed to end zones EZ1 and EZ2 respectively in a diffusion furnace 1, temperature difference in a center zone CZ and the end zones EZ1 and EZ2 is reduced. The heater 6 in the end zone EZ1 constitutes a heater circuit 9 together with a heating temperature controller 12, and the heater 7 in the end zone EZ2 organizes a heater circuit 10 together with a heating temperature controller 13. Accordingly, the heating temperatures of the end zones are elevated and temperatures in the end zones and the center zone are equalized as much as possible, thus lengthening the flat zone length of the diffusion furnace.
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