| 摘要 |
PURPOSE:To efficiently produce a high-purity liq., by heating a photoelectron emitting material or its vicinity when the fine particles in the liq. are charged by the photoelectron emitted from the photoelectron emitting material irradiated by UV rays, etc., and the fine charged particles are removed from the liq. CONSTITUTION:The heated photoelectron emitting part and the fine charged particle collecting part 4 consist of a heater 10 for mainly heating extremely pure water 50 at an inlet, a UV lamp 20, the photoelectron emitting material 30 incorporating a heater, and a fine charged particle collecting filter 40. The emitting material 30 is externally heated by the extremely pure water 50 heated by the heater 10 and also internally heated by the heater incorporated in the emitting material 30, UV rays are projected from the lamp 20 to promote the emission of the photoelectron from the emitting material 30, and hence the fine particles in the extremely pure water 50 are efficiently charged, collected by the filter 40, and removed. Besides, the microbes are simultaneously sterilized, and clean extremely pure water 5 is produced.
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