| 摘要 |
PURPOSE:To obtain an electric wiring structure which can shorten the delay time without changing the cross-sectional area in such a way that the cross-sectional shape of a conductor is made circular. CONSTITUTION:A conductor 2 having a circular cross section is buried in an insulator 3 which is composed of, e.g., silicon oxide, silicon nitride or the like and which is formed on a substrate 1 composed of silicon. Even with the same operation and function as those of a conventional structure, the delay time is shortened. This means that, when the cross-sectional area is definite, the surface area of the conductor having the circular cross section is smaller than that of the conductor having a rectangular cross section. That is to say, this means that the delay time of the conductor having the circular cross section can be made shorter than that of the conductor having the rectangular cross section. If the resistance of the conductor 2 is R (OMEGA) and the capacitance between the conductor 2 and the substrate 1 is CB (F), the delay time tau can be given by tau=R.CB (sec). A device becomes excellent with the shortening of the delay time tau.
|
