| 摘要 |
PURPOSE:To stably maintain the hermetic state of a treatment chamber without requiring an additive clamping mechanism, etc., by providing a pressurized chamber to enclose a door 9 for hermetic sealing and maintaining the pressure in the pressurized chamber under the pressure higher than the pressure in the treatment chamber. CONSTITUTION:The hermetically pressurized chamber 6 enclosing the door 9 of the treatment chamber C is provided to a sluice valve device to be interposed between the respective treatment chambers C of a heat treatment furnace, etc., and the atm. A working gas is press-fed into the pressurized chamber 6 in such a manner that the pressure in the pressurized chamber 6 increases to the pressure higher than the pressure in the treatment chamber C adjacent thereto. The door 9 is formed to an arch shape projecting toward the pressurized chamber 6 so as to withstand the pressure difference exerted to the door 9 easily in stress. The hermetic sealing of the treatment chamber C is thereby surely and automatically executed.
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