| 摘要 |
PURPOSE:To obtain an efficient target for sputtering by forming the erosion area of a target a high purity material and the other region with a low purity material. CONSTITUTION:The supposed erosion area 2 of a target fixed o a backing plate 3 and the vicinity of the area 2 are formed with a high purity target material 1 and the other region is formed with a low purity target material 4. Thus, an efficient target is obtd. at a low cost. |
