| 摘要 |
PURPOSE:To attain minute adjustment of the frequency by forming an electrode onto a substrate major plane made of Li2B4O7, melting a part exposed of the substrate on the substrate major plane so as to change the apparent layer thickness of the substrate. CONSTITUTION:Pure water is sprayed onto a face formed with an electrode pattern 1 in a wafer made of Li2B4O7 formed with the electrode 1 by the lift-off method. Then the pure water forms a groove 3 formed by melting the major plane of the wafer 2 not formed with the electrode pattern 1 by using the electrode pattern 1 as a mask. Thus, the frequency of the surface acoustic wave device deviated by the frequency by the lift-off method is corrected into the design value. Then plural surface acoustic wave devices (in this case, one) are cut off to complete the surface acoustic wave device from the wafer based on the dicing line. Thus, the frequency characteristic of the surface acoustic wave device using Li2B4O7 as the piezoelectric substrate is adjusted minutely.
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